Beneq Introduces New Rotary Spatial ALD Solution

Beneq, a leading supplier of ALD equipment and thin film coating services, and Lotus Applied Technology, a technology development and licensing company working to break down the cost and throughput limitations of conventional Atomic Layer Deposition, today announced that they have signed a licensing agreement about Lotus Applied Technology’s Vortex ALD technology. Beneq will be using the technology developed by LotusAT in new rotary spatial ALD equipment that provides low process cost and high productivity in industrial ALD applications, such as barrier, passivation, insulation and protection applications for MEMS, LED, OLED, photovoltaics, memory, battery and sensors.
Source: Beneq Oy