02.06.08 Sputtering targets for flat glass coating
Sputtering targets for flat glass coating
FHR Anlagenbau GmbH in Ottendorf-Okrilla near Dresden (Saxonia) was founded in 1991 by a group of engineers with long years of experience in the field of vacuum and thin film technologies. The company had a fast growing development during the first years of business and moved into new business facilities end of 1993. Because of the continuous fast growing development the company moved again into new larger business facilities begin of 2000.
Today the company is working in the field of high- rate sputtering for microelectronics and other applications with customers amongst research institutes and industry. A wide scale of state of the art equipment like in- line systems and cluster tools is available now.
Innovative developments are in the field of new plasma deposition and etching technologies, new sources and in the field of cleaning and stripping processes.
FHR Anlagenbau GmbH delivers targets for the micro-electronic sector, for glass coating and any other sector in the coating industry according the stringent demands on clean-room packaging and certified purity levels as required for the micro electronics. The company is leading in the bonding of most any materials to copper backings to guarantee optimal coating.
FHR Anlagenbau GmbH is actually selling its products and services in Europe and world wide by using several distributors.
Sputtering equipment, batch type in-line Etching equipment Cluster tools for deposition and etching UV-Ozone cleaning equipment Magnetron sources Sputtering targets Vacuum components Pure gas components & systems
In its third line of business activities FHR Anlagenbau GmbH trades in various equipment for thin film technologies and surface analysis covering Germany and other countries:
Scanning probe microscopes by Danish Micro Engineering A/S, Denmark Thermal treatment equipment by RTP and special furnaces for SiC by J.I.P.ELEC France High purity gas components by FLOWLINK SA, France. Horizontal furnaces for annealing, diffusion and CVD; Photo CVD by Tystar Corporation, USA
FHR is certified according to DIN ISO 9001 in order to guarantee high quality service to our customers.