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FHR Anlagenbau GmbH

Am Hügel 2, 01458 Ottendorf-Okrilla
Telephone +49 35205 520-0
Fax +49 35205 520-40

Hall map

glasstec 2018 hall map (Hall 11): stand G19

Fairground map

glasstec 2018 fairground map: Hall 11


Dr. Bontscho Bontschew

Senior Sales Manager

+49 171 6797566


Marian Böhling

Head of Sales and Business Development

+49 151 19307819


Our range of products

Product categories

  • 01  Glass production/Production Technology
  • 01.14  Photovoltaic production/Production Technologies
  • 01.14.02  Panel production
  •  Coating/sputtering systems
  • 02  Glass processing and finishing
  • 02.06  Coating technology
  • 02.06.01  Vacuum coating equipment
  • 04  Tools, replacement and spare parts, auxiliary equipment and fittings
  • 04.03  Surface treatment, Printing Technology, Coating Technology, Adhesive Technology
  • 04.03.05  Sputtering targets for flat glass coating

Sputtering targets for flat glass coating

Our products

Product category: Coating/sputtering systems, Vacuum coating equipment

FHR.Line product series

Indus­trial manufac­turing lines, highly productive pilot lines or research and development systems

- Uni- or bi-directional (oscillating) substrate transport
- Simultaneous coating of the front and back possible
- Various process technologies can be integrated
- Vertical and horizontal designs are available

Inline con­cepts are the right ans­wer for high pro­duc­tion magne­tron sput­te­ring, ther­mal eva­po­ra­tion or PECVD coa­ting par­ti­cu­larly for rigid sub­stra­tes. We offer vacuum coa­ting solu­ti­ons desi­gned and cust­o­mi­zed to your par­ti­cu­lar sub­strate size and coa­ting requi­re­ments in eit­her hori­zon­tal or ver­ti­cal con­fi­gu­ra­tion. We can inte­grate pre-tre­at­ment pro­ces­ses by hea­ting or etching the sub­stra­tes as well as a fully auto­ma­tic loa­ding/unloa­ding sys­tem on a cust­o­mer-spe­ci­fic basis. In-line sys­tems have a wide range of app­li­ca­ti­ons, whe­ther it be as a high-pro­duc­tion, con­ti­nuous flow sys­tem with con­ti­nuous pro­duct out­put or as a pen­du­lum sys­tem being highly fle­xi­ble regar­ding the pro­duct due to exch­an­ge­able tar­gets.

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Product category: Coating/sputtering systems, Vacuum coating equipment

FHR.Roll product series

Film coating for flexible electronics and thin film solar cells in research and production

- Precision mechanical winding with web edge guide
- Production of form-flexible thin film solar cells, heat protection foils and printed circuit boards
- AVOtouch technology for contact-free front side coating
- Suitable for portable, lightweight and flexible applications

Modern elec­tro­nics are fle­xi­ble. Our roll-to-roll vacuum coa­ting sys­tems with PVD and PECVD tech­no­logy are the ideal sys­tem con­cept for pro­duc­tion of pro­ducts such as fle­xi­ble solar cells, orga­nic dis­play films or fle­xi­ble sen­sors. Metal and plas­tic films are used as sub­strate mate­ri­als, the coa­ting width is set indi­vi­dually. This design con­cept offers the hig­hest level of fle­xi­bi­lity in the field of sput­te­ring and eva­po­ra­tion pro­ces­ses. A fre­ely pro­gramma­ble web win­ding sys­tem and the ability to regu­late the tem­pe­ra­ture of the sub­strate allow various sub­strate mate­ri­als and film thick­nes­ses to be pro­ces­sed in a wide pro­cess win­dow. We have the exper­tise nee­ded to inte­grate in-situ pro­cess moni­to­ring and deri­ved online pro­cess con­trol.

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Product category: Coating/sputtering systems, Vacuum coating equipment

FHR.Star product series

Process systems for deposition, removal and modifi­cation of thin layers on wafer-type substrates in small scale, pilot production or in research and development

- Based on a flexible modular concept
- Various technological processes can be integrated
- Standard for processing semiconductor wafers

Maxi­mum fle­xi­bi­lity in con­fi­gu­ring pro­cess cham­bers and gene­ral sub­strate hand­ling make our FHR.Star vacuum pro­ces­sing sys­tems the num­ber-one choice for high-tech R & D app­li­ca­ti­ons. More­o­ver, this type of vacuum pro­ces­sing sys­tems, cal­led as a clus­ter con­cept, is con­side­red the stan­dard solu­tion in micro­elec­tro­nics and wafer-type sub­stra­tes. The choice is yours: We will often alre­ady have a pro­ven module solu­tion avail­able for your desi­red vacuum pro­cess and sub­strate dia­me­ter. If not, we will work with you to deve­lop a new con­fi­gu­ra­tion that meets your needs.

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Product category: Sputtering targets for flat glass coating

FHR.Sputtering targets

Your partner for every­thing related to sputtering targets
Consulting, production and recycling from a single supplier

We offer an exten­sive range of sput­te­ring tar­get and coa­ting mate­ri­als, in all shapes, sizes and com­po­si­ti­ons. Feel free to con­tact us for any issue rela­ted to coa­ting mate­ri­als. After an initial con­sul­ta­tion regar­ding the tech­ni­cal and eco­no­mic fea­si­bi­lity of your request, we will take care of the fol­lo­wing ser­vices for you:

- Production and development of coating materials
- Debonding old sputtering targets
- Bonding new sputtering targets

Consultation on the optimal design, development and production of heat sinks and back plates
Recycling valuable materials or disposing of residual materials
Our ambi­tion in all of these mat­ters is to accom­mo­date requests for large series as well as for indi­vi­dual pie­ces and sput­te­ring tar­gets with unusual design. We look for­ward to hea­ring from you!  

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About us

Company details

Founded in 1991, FHR Anlagenbau GmbH provides customized vacuum coating equipment and sputter targets as well as coating and equipment services from a single expert source.

We support our customers in close contact starting from process development via R&D scale to mass production. Our portfolio combines technologies as sputtering, evaporation, PECVD and ALD with the tool types cluster, inline, roll-to-roll and box. Based in Germany, with tools installed worldwide in various branches such as semiconductor, MEMS, electronic, sensor, optic, display, photovoltaic and more industries, we are ready to support you wherever you want to go.

The Thin Film Company

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Company data

Number of employees