Industrial manufacturing lines, highly productive pilot lines or research and development systems
- Uni- or bi-directional (oscillating) substrate transport - Simultaneous coating of the front and back possible - Various process technologies can be integrated - Vertical and horizontal designs are available
Inline concepts are the right answer for high production magnetron sputtering, thermal evaporation or PECVD coating particularly for rigid substrates. We offer vacuum coating solutions designed and customized to your particular substrate size and coating requirements in either horizontal or vertical configuration. We can integrate pre-treatment processes by heating or etching the substrates as well as a fully automatic loading/unloading system on a customer-specific basis. In-line systems have a wide range of applications, whether it be as a high-production, continuous flow system with continuous product output or as a pendulum system being highly flexible regarding the product due to exchangeable targets.
Film coating for flexible electronics and thin film solar cells in research and production
- Precision mechanical winding with web edge guide - Production of form-flexible thin film solar cells, heat protection foils and printed circuit boards - AVOtouch technology for contact-free front side coating - Suitable for portable, lightweight and flexible applications
Modern electronics are flexible. Our roll-to-roll vacuum coating systems with PVD and PECVD technology are the ideal system concept for production of products such as flexible solar cells, organic display films or flexible sensors. Metal and plastic films are used as substrate materials, the coating width is set individually. This design concept offers the highest level of flexibility in the field of sputtering and evaporation processes. A freely programmable web winding system and the ability to regulate the temperature of the substrate allow various substrate materials and film thicknesses to be processed in a wide process window. We have the expertise needed to integrate in-situ process monitoring and derived online process control.
Process systems for deposition, removal and modification of thin layers on wafer-type substrates in small scale, pilot production or in research and development
- Based on a flexible modular concept - Various technological processes can be integrated - Standard for processing semiconductor wafers
Maximum flexibility in configuring process chambers and general substrate handling make our FHR.Star vacuum processing systems the number-one choice for high-tech R & D applications. Moreover, this type of vacuum processing systems, called as a cluster concept, is considered the standard solution in microelectronics and wafer-type substrates. The choice is yours: We will often already have a proven module solution available for your desired vacuum process and substrate diameter. If not, we will work with you to develop a new configuration that meets your needs.
Product category: Sputtering targets for flat glass coating
Your partner for everything related to sputtering targets Consulting, production and recycling from a single supplier
We offer an extensive range of sputtering target and coating materials, in all shapes, sizes and compositions. Feel free to contact us for any issue related to coating materials. After an initial consultation regarding the technical and economic feasibility of your request, we will take care of the following services for you:
- Production and development of coating materials - Debonding old sputtering targets - Bonding new sputtering targets
Consultation on the optimal design, development and production of heat sinks and back plates Recycling valuable materials or disposing of residual materials Our ambition in all of these matters is to accommodate requests for large series as well as for individual pieces and sputtering targets with unusual design. We look forward to hearing from you!
Founded in 1991, FHR Anlagenbau GmbH provides customized vacuum coating equipment and sputter targets as well as coating and equipment services from a single expert source.
We support our customers in close contact starting from process development via R&D scale to mass production. Our portfolio combines technologies as sputtering, evaporation, PECVD and ALD with the tool types cluster, inline, roll-to-roll and box. Based in Germany, with tools installed worldwide in various branches such as semiconductor, MEMS, electronic, sensor, optic, display, photovoltaic and more industries, we are ready to support you wherever you want to go.