Product category: Sputtering targets for flat glass coating
Low melting point continuous casted rotatable targets We have developed together with Ansun Protective Metals, a new continuous casting process to produce rotatable sputtering targets. This patented process is a vertical continuous casting process which ensures homogeneous metallurgical target structure. Temperature monitoring and process automation allow a fine control of our C-Cast target manufacturing even for rotatable targets up to 4m length. This technique of casting provides also a very good control of the chemical bonding between the backing tube and the target material. This ensures a maximal cooling efficiency of the target during the sputtering process. Our non-destructive control (Ultrasound) scan of each target confirms full bonding between the backing tube and the target material.
We have also optimised the complete manufacturing process to allow several refilling of the target, to decrease the overall cost of our C-Cast targets. We have developed a special machine to make the straightening of the backing tubes easier. Currently available materials: Pure Sn, ZnAl alloys and ZnSn alloys Other low melting points alloys are feasible ( SnZnSb,…) A new continuous casting machine was installed in 2014 in our site of Ellange, to cover our clients needs all over Europe.
As a summary the advantages of our C-Cast targets are: Metallurgical homogeneity along all length of the target. Chemical bonding between backing tube and target material for a maximum cooling efficiency during sputtering process. Full bonding control by Ultrasound of each target before delivery. Several refilling allowed thanks to our optimised manufacturing procedure. At each refilling, checkup of the backing tube concentricity, bending and straightening operation if necessary.
Engineering Services for optimizing sputtering processes
We have acquired a typical know-how in static magnetic fields optimisation for magnetron coaters. Feeling that a lot of trouble in sputtering process is due to static magnetic field circuit and that the overall productivity of a coater can be improved by optimising the magnetic arrays, we have developed specific tools to simulate and optimize magnetrons. We can offer services like: On site Magnetic field diagnosis with our 3D Magnetic Mapping Machine Shunt insertion, and optimisation Design of specific magnet arrays, to increase electron bombardment, target usage, … With the 3D Magnetic Mapping Machine, we have developed software to analyze the magnetic field, and simulate the coating uniformity. The result is displayed as a 2D or 3D curve, showing areas where magnetic field has to be tuned. This feature makes the tuning of rotatable magnet bars much easier, and allows less productivity losses in magnet bar tuning.
Thanks to our up-to-date machine shop, we are also able to manufacture accessories around coaters like: End block covers Shields in various sizes, adapted to various coaters Backing plates, in a lot of different dimensions, depending on clients coater size.
GRADEL is established in Luxembourg since 1965. The company is operating 2 activities: Project management of special purpose machines dedicated to nuclear, space and general industry and production of sputtering targets for the glass industry. Project management of special purpose machines GRADEL develops turn-key special purpose machines (mechanical automated equipment) for more than 50 years. GRADEL is active in the design and realisation of turn-key special purpose machines (mechanical automated equipment). This activity is mainly dedicated to applications for nuclear (maintenance and dismantling equipment) and space sectors (MGSE – Mechanical Ground Support Equipment). GRADEL is also able to offer solutions to the general industry. GRADEL supports its customers all over the project: from the definition of the specifications up to the installation and operation of the equipment, through design, realisation, assembly and test. The company offers after sales services on all its products (maintenance, training, modifications, spare parts, etc…) and has a dedicated team for assisting customers on site.