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BASF Corporation

46820 Freemont Blvd., 94538 Freemont, CA
USA
Telephone +1 510 4902150
Fax +1 510 5650423
tempsensing@basf.com

Our range of products

Product categories

  • 05  Measurement, testing, control technology and software
  • 05.01  Measurement and control technology, sensoring
  • 05.01.01  Measurement and control
  • 05.01.01.05  Measurement and control of glass temperature

Our products

Product category: Measurement and control of glass temperature

Optical Pyrometers for the Solar Industry

At BASF, we believe chemistry will play an important role in the future of solar technology, enabling the sun’s energy to make a sustainable contribution towards a low carbon society. BASF has solutions that can benefit silicon wafer and thin film technologies, as well as solar energy products such as panels and cells.

Silicon Wafer Production
EXACTUS® optical temperature sensors provide the accuracy and precision necessary for silicon wafer production. EXACTUS® sensors enhance control of critical processes; whether in single crystal ingot pulling, polycrystalline casting, or ribbon pulling; improving quality and yield.

Solar Cell Production
BASF’s advanced EXACTUS® optical temperature sensors control critical deposition and doping processes in the manufacturing of solar cells. Exactus’s capability to measure low temperatures at short wavelengths can enable higher product yield.

Solar Panel Production
EXACTUS® optical temperature sensors provide the low-temperature capability, speed, and repeatability necessary for tabber/stringer process steps. Our capabilites can increase quality and yield during laser or induction soldering of individual solar cells into modules.

Thin Film Production
The capability of BASF’s advanced EXACTUS® optical temperature sensors to measure low temperatures at short wavelengths makes it well suited for thin film deposition applications. EXACTUS®’s highly repeatable measurements and fast response time can enable higher product yields.

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Product category: Measurement and control of glass temperature

Optical Pyrometer Semiconductor

BASF EXACTUS®optical pyrometers provide critical semiconductor process temperature information that drives better process yields and increases profitability. Exactus technology stands out because of its industry leading capabilities.

Low temperatures (25ºC and higher) are measured using short wavelengths. EXACTUS® probes deliver high precision, with resolution up to 0.001ºC, accuracy of 1.5ºC and extremely low measurement drift. With speeds up to 1,000 readings per second, and a broad dynamic range at any given wavelength, Exactus temperature measurement solutions are well suited for the semiconductor industry.

BASF’s innovative technology offers numerous advantages in controlling wafer-to-wafer uniformity in both temperature and film thickness. The highly sensitive electronics and advanced optics mean shorter wavelength detectors can be used to measure radiant energy. This decreases errors from both wafer transmission and emissivity. Compact size and digital output allow Exactus sensors to be placed directly on or around a process tool, eliminating the need for fiber cables and improving process repeatability. Fiber cables are a primary source of measurement errors. In addition, the instrument’s high speed and high resolution provide better control and noise suppression. The result is better monitoring of wafer temperature and improved process results.

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Product category: Measurement and control of glass temperature

EXACTUS Optical Pyrometer

A leader in precious-metal thermocouples for many years, BASF more recently applied its technological expertise to optical-based temperature measurement. Designed primarily for OEM wafer-temperature measurement applications, the EXACTUS® optical pyrometers provide significant performance advantages in non-contact temperature measurement. Numerous pending patents cover these breakthroughs which result in industry-leading performance for accuracy, repeatability, and stability. Our performance advantage allows us to successfully measure processes in many applications which had been impossible.
EXACTUS® instruments offer a complete temperature measurement system in each sensor head. State-of-the-art technology allows for custom-tailored integration to specific customer applications.

EXACTUS® offers:
  • Low-temperature measurements (25°C and higher) using short wavelengths
  • Measurement of single crystal silicon down to 200°C using 900nm IR radiation
  • High precision with resolution up to 0.001°C and accuracy of 1.5°C
  • Speeds up to 1,000 readings per second
  • Broad dynamic range at any given wavelength
In addition, the entire product line features a user-friendly design. Features that facilitate use include:
  • Readily configurable sensor housing
  • Flexible design
  • Customizable hardware, software, optics and probes
  • RS232, RS485/422, and Analog output from sensors
  • Sophisticated Windows-based graphical interface
Semiconductor Process Control Advantage

EXACTUS® technology delivers numerous advantages in controlling wafer-to-wafer uniformity in both temperature and film thickness. The highly sensitive electronics and advanced optics mean shorter wavelength detectors can be used to measure radiant energy. This decreases errors from both wafer transmission and emissivity. In addition, the instruments' high speed and high resolution provide better control and noise suppression, which results in better monitoring of wafer temperature and improved process results.

While designed for exacting semiconductor applications, EXACTUS® optical pyrometers may be suitable for a wide range of applications in other industries. Ultra-sensitive electronics, precision optics and the ability to measure low-temperatures using short wavelength allow for tighter process control, fewer emissivity errors and improved overall performance.
Applications that may be ideally suited for EXACTUS® pyrometers include:
  • Container glass
  • Glass fiber pulling
  • Plastics welding
  • Industrial heating
  • Laser and ultrasound medical technologies

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About us

Company portrait

Welcome to the Catalysts Division of BASF

BASF's Catalysts division, headquartered in Iselin, New Jersey, is the world’s leading supplier of environmental and process catalysts. The group employs more than 5,000, with over 30 manufacturing sites worldwide.

As a global division of BASF SE, Ludwigshafen, Germany, Catalysts offers exceptional expertise in the development of technologies that protect the air we breathe, produce the fuels that power our world and ensure efficient production of a wide variety of chemicals, plastics and other products including advanced battery materials.